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D6F-P
Characteristics/Performance
MEMS Flow Sensor
Model
Flow Range (See note 1.)
D6F-P0001A1
0 to 0.1 L/min
D6F-P0010A1
0 to 1 L/min
D6F-P0010A2
D6F-P0010AM2
Calibration Gas (See note 2.)
Air
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Output Voltage
Accuracy
Barb joint
Maximum outside diameter: 4.9 mm
Lead terminals
4.75 to 5.25 VDC
15 mA max. with no load and a Vcc of 5.0 V
0.5 to 2.5 VDC (Load resistance: 10 k Ω )
± 5% FS (25 ° C characteristic)
Three-pin connector
Manifold
Repeatability (See note 3.)
± 1.0% FS
± 0.4% FS
Output Voltage (Max.)
Output Voltage (Min.)
Rated Power Supply Voltage
Rated Output Voltage
Case
Degree of Protection
Withstand Pressure
3.1 VDC (Load resistance: 10 k Ω )
0 VDC (Load resistance: 10 k Ω )
10 VDC
4 VDC
PBT
IEC IP40
50 kPa
Pressure Drop (See note 3.)
0.005 kPa
0.19 kPa
0.67 kPa
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
Temperature Characteristics
Insulation Resistance
Dielectric Strength
? 10 to +60 ° C (with no condensation or icing)
35% to 85% (with no condensation or icing)
? 40 to +80 ° C (with no condensation or icing)
35% to 85% (with no condensation or icing)
± 5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C
Between Sensor outer cover and lead terminals: 20 M Ω min. (at 500 VDC)
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight
8.5 g
8.0 g
Note: 1. Volumetric flow rate at 0 ° C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
2
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